VeraSpec™ Atmospheric Pressure Ionization Mass Spectrometer (APIMS)

Our TIGER OPTICS™ VeraSpec™ Atmospheric Pressure Ionization Mass Spectrometer (APIMS) is designed for reliable and repeatable low parts-per-trillion detection limits for contamination control in Ultra-High Purity (UHP) gases used in semiconductor and other high-tech industrial applications. Contamination is costly, and for more than 30 years our EXTREL quadrupole mass spectrometry technology has been the research and industrial standard for on-line detection of low-level components of gas mixtures. Our VeraSpec APIMS utilizes an EXTREL 19mm, tri-filter quadrupole mass spectrometer filter ideal for semiconductor gas analysis for the very best performance, reliability, and uptime. Industry-best lower detection limits (LDLs) for bulk gas analysis Real-time, multi-species monitoring for ALL critical Impurities in bulk gases including trace O2, H2, H2O, CH4, CO, CO2, Xe and more Well-established, powerful mass spectrometry technology Unparalleled measurement range from PPT to 100% with unique dual-source ionization configuration